Tabletop CMP experimental device 'BC-15'
CMP material development, ideal for research and development! It is a tabletop CMP experimental device that allows you to conduct research and development conveniently.
【Product PR】 Kemet Japan's "BC-15" is a versatile tabletop experimental device that can be widely used for CMP material development, material screening, and device development. The platen diameter is 15 inches, and the platen rotation speed ranges from 5 to 100 RPM. The maximum workpiece diameter is φ152mm. It can accommodate chip sizes up to φ6-inch wafer sizes. 【Features】 ◆ The underside of the base plate has magnets, making it easy to attach and detach. ◆ It is equipped with a touch panel. ◆ It can operate automatically; once set, you only need to press start to begin processing.
- 企業：北川グレステック 本社
- 価格：Other
